APPARATUS FOR THE DETECTION OF THE SURFACE PROFILE OF A SURFACE OF AN OBJECT USING INTERFEROMETRY DISTANCE MEASUREMENT

摘要

Assembly for detecting the surface profile (52) of an object surface (110) by means of interferometric distance measurement, comprising: a radiation source (10, 20, 30) for generating monochromatic light (22, 24, 34); an optic assembly (80, 90, 100) adapted to transmit a first portion of the light (310) from each radiation source to a measuring range on the object surface (110) for reflection and superimpose another portion of the light (350) from the radiation source which is not reflected at the object surface (110) to generate interference; a detector assembly (170) for detecting the resulting light beams (380); and a signal processing unit for processing the interferometric signals (54, 56, 58) detected in such a way; is characterized in that the optic assembly (80, 90, 100) is provided with means (90) for separating a portion of the light (330) from the radiation source (10, 20, 30) which was reflected at the same measuring range on the object surface (110) without interference; a detector assembly (200) is provided for detecting the non-interfering light beams (370); wherein the reflection signals (84, 86, 88) generated by the detector assembly (200) for detecting the non-interfering light beams are transmitted to the signal processing unit.