首页> 外国专利> PHOTOACOUSTICS METHOD WITH A MEASURING LIGHT COMPRISING A PREDETERMINED WAVELENGTH RANGE FOR DETERMINING THE PROPERTIES OF AN INHOMOGENEOUS SAMPLE

PHOTOACOUSTICS METHOD WITH A MEASURING LIGHT COMPRISING A PREDETERMINED WAVELENGTH RANGE FOR DETERMINING THE PROPERTIES OF AN INHOMOGENEOUS SAMPLE

机译:包含预定波长范围的测量光的光声法,用于测定非均质样品的性质

摘要

The invention relates to a photoacoustic method with a measuring light having a predetermined wavelength range for determining properties of an inhomogeneous sample, wherein the sample has a mean absorption length μ from the interval 1-100 micrometers for the predetermined wavelength range, comprising the steps:a) irradiating at least one measuring light pulse having a predetermined pulse duration and predetermined intensity onto a measuring surface of the surface F with F ¼ of the surface of the inhomogeneous sample;b) detecting at least one pressure transient at the measuring surface, wherein the pressure transient is produced by absorption of the at least one measuring light pulse in the inhomogeneous sample to generate a pressure wave propagating to the measuring surface;c) calculating a value for the energy density absorbed by the sample during the pulse duration from the course of the at least one pressure transient at the beginning and at the end of the at least one measurement light pulse;marked byd) repeating steps a) to c) for different angles of incidence of the measurement light relative to the normal of the measurement surface, wherein the energy density values determined in c) are respectively indexed with the angle of incidence;e) modeling the inhomogeneous sample as a layer stack, wherein each layer is assigned at least one layer thickness and an absorption coefficient, wherein at least one absorption coefficient of a layer is a fit parameter;f) performing a fit procedure for the fit parameters of the layer stack, wherein the distribution of the energy density values indexed to the angle of incidence on contributions of the individual layers is varied by varying the fit parameters until a predetermined consistency criterion is fulfilled;g) reading the fitted fit parameters as values at least for the depth resolved absorption coefficient of the inhomogeneous sample.
机译:本发明涉及一种光声方法,该方法使用具有预定波长范围的测量光来确定不均匀样品的特性,其中该样品对于预定波长范围具有从1-100微米的间隔开始的平均吸收长度μ,包括以下步骤:a)以不均匀样品的表面的F 1/4照射至少一个具有预定脉冲持续时间和预定强度的测量光脉冲到表面F的测量表面上;b)检测在测量表面上的至少一个压力瞬变,其中,通过吸收不均匀样品中的至少一个测量光脉冲以产生传播到测量表面的压力波来产生压力瞬变;c)从在至少一个测量光脉冲的开始和结束处的至少一个压力瞬变的过程,计算在脉冲持续时间内样品吸收的能量密度的值;标有d)对于测量光相对于测量表面的法线的不同入射角重复步骤a)至c),其中在c)中确定的能量密度值分别用入射角索引;e)将不均匀样品建模为层堆叠,其中为每一层分配至少一个层厚度和吸收系数,其中层的至少一个吸收系数是拟合参数;f)对叠层的拟合参数执行拟合程序,其中,通过改变拟合参数直至满足预定的一致性标准,来改变索引为入射角的能量密度值的分布。g)读取拟合拟合参数,至少是对于非均质样品的深度分辨吸收系数。

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