首页> 外国专利> PHOTOACOUSTIC METHOD WITH A MEASURING LIGHT HAVING A PREDETERMINED WAVELENGTH RANGE FOR THE DETERMINATION OF PROPERTIES OF AN INHOMOGENEOUS SAMPLE

PHOTOACOUSTIC METHOD WITH A MEASURING LIGHT HAVING A PREDETERMINED WAVELENGTH RANGE FOR THE DETERMINATION OF PROPERTIES OF AN INHOMOGENEOUS SAMPLE

机译:具有预定波长范围的测量光的光声法,用于测定非均质样品的性质

摘要

The invention relates to a photoacoustic method comprising a measurement light having a predefined wavelength range for determining properties of an inhomogeneous sample, the sample having a mean absorption length μ from the range of 1 to 100 micrometers for the predefined wavelength range, the method comprising the following steps: a) radiating at least one measurement light pulse having a predefined pulse duration and a predefined intensity onto a measurement area of the area F with √Fμ in the surface of the inhomogeneous sample; b) detecting at least one pressure transient at the measurement area, the pressure transient resulting from the absorption of the at least one measurement light pulse in the inhomogeneous sample with production of a pressure wave propagating to the measurement area; c) calculating a value for the energy density absorbed by the sample during the pulse duration from the curve of the at least one pressure transient at the start and at the end of the at least one measurement light pulse; characterized by d) repetition of steps a) to c) for different angles of incidence of the measurement light with respect to the normal of the measurement area, the energy density values determined in c) each being indicated with the angle of incidence; e) modeling the inhomogeneous sample as a stack of layers, each layer being assigned at least a layer thickness and an absorption coefficient, at least one absorption coefficient of a layer being a fitting parameter; f) performing a fitting procedure for the fitting parameters of the stack of layers, the division of the energy density values indicated with the angle of incidence into contributions of the individual layers being varied by variation of the fitting parameters until a predefined consistency criterion is met; g) reading out the fitted fitting parameters as values at least for the depth-resolved absorption coefficient of the inhomogeneous sample.
机译:本发明涉及一种光声方法,该方法包括具有用于确定不均匀样品的特性的预定波长范围的测量光,对于该预定波长范围,该样品的平均吸收长度μ在1至100微米的范围内。步骤如下:a)在不均匀样品的表面上以√Fμ辐射至少一个具有预定脉冲持续时间和预定强度的测量光脉冲到区域F的测量区域上; b)在测量区域检测至少一个压力瞬变,该压力瞬变是由于非均质样品中的至少一个测量光脉冲被吸收而产生的,该压力波传播到测量区域; c)根据在至少一个测量光脉冲的开始和结束时的至少一个压力瞬变的曲线,计算在脉冲持续时间内样品吸收的能量密度的值;其特征在于:d)针对测量光相对于测量区域的法线的不同入射角重复步骤a)至c),在c)中确定的能量密度值分别用入射角表示; e)将不均匀样品建模为层的堆叠,每一层至少分配有一层厚度和吸收系数,一层的至少一个吸收系数是拟合参数; f)对层堆叠的拟合参数执行拟合程序,通过拟合参数的变化来改变入射角指示的能量密度值对各个层的贡献的划分,直到满足预定的一致性标准为止; g)读出拟合的拟合参数,至少是非均质样品的深度分辨吸收系数的值。

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