ANALYSIS AND DESIGN METHODS FOR CAPACITIVE TRANSDUCERS

摘要

To provide methods for analyzing and designing a capacitive transducer that can be easily adapted to an expression of a subsequent circuit.SOLUTION: A membrane 30 provided with a predetermined number of vent holes with an inner cavity interposed in a substrate 10 having a sound hole 11 is disposed. A back plate 40 is disposed on an opposite side of the membrane from the substrate with an outer cavity interposed therebetween. Methods for analyzing and designing a capacitive transducer having a MEMS structure that is entirely covered with a cover 50 are provided. An obtained output current Iout is evaluated by the following formula.SELECTED DRAWING: Figure 1