SCANNING MICROWAVE MICROSCOPE AND METHOD OF MEASURING ELECTRICAL PROPERTIES OF SURFACE OF MEASURED OBJECT USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve the sensitivity of a scanning microwave microscope using a resonant circuit (interferometer) by reducing the number of components without using active elements.;SOLUTION: A scanning microwave microscope includes an AFM probe 1 capable of scanning the surface of an object to be measured, a T-branch 3 of which a first end 4 is connected to the AFM probe, a phase variable short circuit device 7 connected to a second end 5 of the T branch, a vector network analyzer 9 for connecting the AFM probe and the phase variable short circuit device via a third end 6 of the T-branch. The AFM probe and the phase variable short circuit device constitutes one resonant circuit, and the phase variable short circuit device adjusts the phase of a resonance frequency of a reflected wave signal of an electromagnetic wave irradiated to the surface 13 of an object to be measured 12 via the AFM probe by the vector network analyzer.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT