Etching waste treatment system and etching waste liquid treatment method

摘要

PROBLEM TO BE SOLVED: To provide a waste treatment system and a waste treatment method capable of executing treatment of an etching waste liquid generated in an etching treatment of a glass substrate easily and at low cost regardless of conditions of the etching waste liquid.;SOLUTION: An etching waste liquid treatment system 10 is configured to perform a treatment of an etching waste liquid generated in an etching apparatus for etching treatment of a glass substrate. This etching waste liquid treatment system 10 contains at least a reaction tank 15 and an acidic scrubber 30 as detoxication means. In the reaction tank 15, the etching waste liquid is thickened to a degree to be able to be sent while mitigating its acidity, then the thickened etching waste liquid is converted to neutral sludge.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT