NANOCRYSTALLINE GRAPHENE AND METHOD OF FORMING NANOCRYSTALLINE GRAPHENE

摘要

PROBLEM TO BE SOLVED: To provide nanocrystalline graphene and a method of forming the nanocrystalline graphene.;SOLUTION: The invention relates to nanocrystalline graphene and a method of forming the nanocrystalline graphene using a plasma chemical vapor deposition process. The nanocrystalline graphene may have a ratio of carbon having an sp² bonding structure to total carbon as large as 50-99%. In addition, the nanocrystalline graphene may include crystals having sizes of 0.5 to 100 nm.;SELECTED DRAWING: Figure 1A;COPYRIGHT: (C)2019,JPO&INPIT