レーザー加工装置、レーザー加工システム

摘要

To provide a laser processing device capable of making a small object having a complicated shape.SOLUTION: A laser processing device comprises: a first mirror for scanning along an X-axis, a laser beam irradiated from a laser oscillator to a work-piece; a second mirror for scanning the laser beam along a Y-axis; a galvano optical system including an adjustment part for adjusting a focal position of the laser beam in a Z-axis direction; a holding part for holding the work-piece; a first drive mechanism for moving the first mirror, the second mirror and the adjustment part; and a second drive mechanism for moving the work-piece held by the holding part along at least four axes of the X-axis, the Y-axis, a first rotation axis and a second rotation axis.SELECTED DRAWING: Figure 2