POLISHING APPARATUS COMPRISING SURFACE TEXTURE MEASUREMENT DEVICE FOR ABRASIVE PAD, AND POLISHING SYSTEM

摘要

To provide a polishing apparatus, the throughput of which can be increased by automatically measuring surface texture of an abrasive pad.SOLUTION: A polishing apparatus comprises a surface texture measurement device 30 that measures surface texture of an abrasive pad 2, a support arm 50 that supports the surface texture measurement device 30, and a movement unit 53 that is connected to the support arm 50 and that automatically moves the surface texture measurement device 30 to a measurement position from a retreat position.SELECTED DRAWING: Figure 9