X-RAY DIFFRACTION MEASUREMENT DEVICE AND X-RAY DIFFRACTION MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an X-ray diffraction measurement device that can drastically restrain increasing cost for the device and man-hours and cost to retain the device, and that can carry out inspections over a wide area within a short period of time even though the area to inspect objects to be measured covers a wide area.;SOLUTION: A scintillation counter 22 for detecting intensities of diffracted X-rays occurred on an object OB to be measured when X-rays are radiated to the object OB to be measured is provided in a manner that a light inlet is disposed on a part of areas where the diffraction rings caused by the diffracted X-rays are formed. At the light inlet of the scintillation counter 22, a cap 23 is attached, on which a slit is formed having its short length direction being equal to a radial direction of the diffraction rings. As far as the object to be measured is normal and the point to which the X-rays are radiated is a set position, and when an X-ray intensity distribution curve in the short length direction of the slit is deemed as a normal distribution curve for a standard deviation σ, the edge of the slit shall locate in the area from 1.5σ to 4σ on both ends in the normal distribution curve.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT