Encoder scale, method of manufacturing encoder scale, encoder, robot, electronic component transfer apparatus, printer and projector

摘要

PROBLEM TO BE SOLVED: To provide an encoder scale capable of enhancing detection accuracy while achieving cost reduction and a method of manufacturing the same, and also provide an encoder, a robot, an electronic component transport apparatus, a printer and a projector provided with the encoder scale. . A first area is provided with a plate-like base material 2 and an optical pattern 12 provided on one surface of the base material 2 and in which first areas 121 and second areas 122 are alternately arranged. 121 is a resin layer 3 that is patterned and disposed on the base material 2 and is configured to include a photosensitive resin, and a metal film 4 that is disposed on the resin layer 3 and that is composed of a metal material The surface of the first region 121 is mainly composed of the first surface whose normal direction is the thickness direction of the base material 2, and the surface of the second region 122 is inclined with respect to the first surface An encoder scale 1 mainly composed of a second surface. [Selected figure] Figure 3