Ni-BASED CORROSION RESISTANT ALLOY POWDER FOR ADDITIVE MANUFACTURING, AND ADDITIVE MANUFACTURING ARTICLE USING THE POWDER AND METHOD FOR MANUFACTURING MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

To provide a Ni-based corrosion resistant alloy powder suitable for additive manufacturing, and an additive manufacturing article having excellent corrosion resistance and fewer defects using the above powder, and a member for a semiconductor manufacturing apparatus.SOLUTION: The Ni-based corrosion resistant alloy powder contains, in terms of mass%, Cr by 14.5 to 24.0%, Mo by 12.0 to 23.0%, Fe by 0.01 to 7.00%, Co by 0.001 to 2.500%, Mg by 0.0001 to 0.0050%, N by 0.001 to 0.040%, Mn by 0.005 to 0.50%, Si by 0.001 to 0.200%, Al by 0.01 to 0.50%, Ti by 0.001 to 0.500%, Cu by 0.001 to 0.250%, V by 0.001 to 0.300%, B by 0.0001 to 0.0050%, Zr by 0.0001 to 0.0100%, O by 0.0010 to 0.0300%, and the balance of Ni and as inevitable impurities, C by less than 0.05%, S by less than 0.01%, and P by less than 0.01%. An additive manufacturing article, and a method for manufacturing a member for a semiconductor manufacturing apparatus are also provided.SELECTED DRAWING: Figure 1