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Ni-BASED CORROSION-RESISTANT ALLOY POWDER FOR ADDITIVE MANUFACTURING, AND METHOD FOR PRODUCING ADDITIVE MANUFACTURING PRODUCT OR MEMBER FOR SEMICONDUCTOR PRODUCTION DEVICES USING THE POWDER
Ni-BASED CORROSION-RESISTANT ALLOY POWDER FOR ADDITIVE MANUFACTURING, AND METHOD FOR PRODUCING ADDITIVE MANUFACTURING PRODUCT OR MEMBER FOR SEMICONDUCTOR PRODUCTION DEVICES USING THE POWDER
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机译:镍基耐蚀合金粉末及其制造方法,以及使用该粉末的半导体生产装置用添加剂生产产品或部件的方法
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摘要
Provided is a Ni-based corrosion-resistant alloy powder preferable for additive manufacturing, and provided are an additive manufacturing product and a member for semiconductor production devices having excellent corrosion resistance with few defects by using this powder. A Ni-based corrosion-resistant alloy powder for additive manufacturing comprises in mass %: 14.5 to 24.0% of Cr; 12.0 to 23.0% of Mo; 0.01 to 7.00% of Fe; 0.001 to 2.500% of Co; 0.0001 to 0.0050% of Mg; 0.001 to 0.040% of N; 0.005 to 0.50% of Mn; 0.001 to 0.200% of Si; 0.01 to 0.50% of Al; 0.001 to 0.500% of Ti; 0.001 to 0.250% of Cu; 0.001 to 0.300% of V; 0.0001 to 0.0050% of B; 0.0001 to 0.0100% of Zr; and 0.0010 to 0.0300% of O, and the balance of Ni with inevitable impurities. The inevitable impurities comprise less than 0.05% of C; less than 0.01% of S; and less than 0.01% of P. A method for producing an additive manufacturing product or a member for semiconductor production devices comprises performing additive manufacturing by using the Ni-based corrosion-resistant alloy powder.
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