OPTICAL SPINDLE MULTIPLE DEGREES-OF-FREEDOM ERROR MEASUREMENT DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical spindle multiple degrees-of-freedom error measurement device capable of suppressing a cost by a large amount.SOLUTION: A sensor module 30 includes: a primary sensor group and a sub-sensor group arranged with intervals in a Z-axis direction; and a reflectance spot displacement sensor having an oblique direction laser head and a light-receiving surface. A laser beam emitted from a first laser head and a second laser head of the primary sensor group and a third laser head and a fourth laser head of the sub-sensor group along an X axis and a Y axis direction reach a first light spot displacement sensor, a second light spot displacement sensor, a third light spot displacement sensor and a fourth light spot displacement sensor respectively through a columnar lens of a standard rod 20. A laser beam irradiated from the oblique direction laser head is reflected by a reflection surface of the standard rod 20 and received by the light-receiving surface, and by a change of the laser beam received by a sensor module 30, a movement of the standard rod 20 is measured.SELECTED DRAWING: Figure 1