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Optical sensor, optical inspection apparatus, object internal property estimation method, and object internal information measurement method
Optical sensor, optical inspection apparatus, object internal property estimation method, and object internal information measurement method
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机译:光学传感器,光学检查装置,物体内部特性估计方法和物体内部信息测量方法
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摘要
PROBLEM TO BE SOLVED: To provide an optical sensor that can accurately measure the intensity of light having propagated in an analyte.SOLUTION: An optical sensor 10 comprises: a light source module LM that is attached to an analyte and irradiates the analyte with light; an analyte module DM that is attached to the analyte and includes a light receiving element having at least one light receiving part that receives light with which the analyte is irradiated by the light source module LM and having propagated in the analyte; and correction means that corrects the intensity of light detected by the detection module DM, and includes a driving device for changing at least one of the position and attitude of the light receiving element with respect to the analyte and a control part that controls the driving device.SELECTED DRAWING: Figure 8
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