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Optical sensor, optical inspection apparatus, object internal property estimation method, and object internal information measurement method

机译:光学传感器,光学检查装置,物体内部特性估计方法和物体内部信息测量方法

摘要

PROBLEM TO BE SOLVED: To provide an optical sensor that can accurately measure the intensity of light having propagated in an analyte.SOLUTION: An optical sensor 10 comprises: a light source module LM that is attached to an analyte and irradiates the analyte with light; an analyte module DM that is attached to the analyte and includes a light receiving element having at least one light receiving part that receives light with which the analyte is irradiated by the light source module LM and having propagated in the analyte; and correction means that corrects the intensity of light detected by the detection module DM, and includes a driving device for changing at least one of the position and attitude of the light receiving element with respect to the analyte and a control part that controls the driving device.SELECTED DRAWING: Figure 8
机译:解决的问题:提供一种光学传感器,该光学传感器可以准确地测量在分析物中传播的光的强度。解决方案:光学传感器10包括:光源模块LM,该光源模块LM附着到分析物并用光照射分析物。被分析物模块DM,其附着于被分析物,并具有受光元件,该受光元件具有至少一个受光部,该受光部接收被光源模块LM照射了被分析物的光并在被分析物中传播。校正装置校正由检测模块DM检测到的光的强度,并且包括用于改变光接收元件相对于分析物的位置和姿态中的至少一个的驱动装置以及控制该驱动装置的控制部。 .SELECTED DRAWING:图8

著录项

  • 公开/公告号JP6592900B2

    专利类型

  • 公开/公告日2019-10-23

    原文格式PDF

  • 申请/专利权人 株式会社リコー;

    申请/专利号JP20150005568

  • 发明设计人 ▲高▼橋 陽一郎;石井 稔浩;

    申请日2015-01-15

  • 分类号G01N21/17;G01N21/359;

  • 国家 JP

  • 入库时间 2022-08-21 12:22:17

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