Break device, method of breaking substrate, and member for substrate mounting portion of break device

摘要

Provided is a member suitable for a substrate mounting part of a breaking apparatus which breaks a substrate along a scribe line. In the breaking apparatus which breaks the substrate along the scribe line, the substrate is disposed in a horizontal position on the substrate mounting part. The substrate mounting part comprises: a flat board-shaped transparent elastic body including a first main surface, and a second main surface facing the first main surface being smoother than the first main surface; and a film bonded to the first main surface of the elastic body having a flat surface which is not attached. The first main surface is composed of irregularities, a maximum difference of which is not greater than 50 m, such that a portion near the first main surface is an opaque portion having a visible light transmittance ratio relatively smaller than that of the other portions. The overall visible light transmittance ratio of the transparent elastic body in a thickness direction, where the film is not attached, is greater than 30%, and the visible light transmittance ratio of the substrate mounting part in the thickness direction is not less than 60%. The second main surface is a side on which the substrate is disposed.