FEATURE IMAGE GENERATION DEVICE, INSPECTION EQUIPMENT, FEATURE IMAGE GENERATION METHOD AND FEATURE IMAGE GENERATION PROGRAM

摘要

To provide a feature image generation device capable of appropriately generating, from a reference image, a feature image to be used in matching for alignment of the reference image and a comparison image of high resolution.SOLUTION: When a difference satisfies a prescribed condition, the difference between a first cutout image obtained from an image binarizing, at a first gradation, an edge image in which an edge is extracted from a reference image, and a second cutout image obtained from an image binarizing the edge image at a second gradation, a feature image is obtained by cutting out a same location from an image binarizing the edge image at a gradation between the first gradation and the second gradation.SELECTED DRAWING: Figure 3