Laser facet passivation and system for performing such passivation

摘要

A method of passivating at least one facet of a multilayer waveguide structure comprises the steps of cleaning a first facet of the multilayer waveguide structure in a first chamber of a multi-chamber ultra high vacuum (UHV) system; Moving the cleaned multilayer waveguide structure from the first chamber to the second chamber of the multi-chamber UHV system, and forming a first single crystal passivation layer on the first facet in the second chamber And moving the multilayer waveguide structure from the second chamber to the third chamber of the multi-chamber UHV system, and forming a first dielectric on the first single crystal passivation layer in the third chamber. Forming a coating, and the method comprises applying a multilayer waveguide structure in a UHV environment of a multi-chamber UHV system. It is carried out without removal from the UHV environment.