Single-drive rigid-flex coupled precision movement stage, implementation method and application

摘要

A single-drive rigid-flexible coupled precision movement stage, including linear guide rail (A101), rigid-flexible coupled movement stage, linear drive and displacement sensor (A6), rigid-flexible The stage to be coupled includes a rigid frame (A201), a flexible hinge (A203), and a core moving stage (A202). The linear driver drives the rigid frame (A201) via the flexible hinge (A203) to move to the linear guide rail (A101). The moving stage can realize high-accuracy continuous change / displacement and avoid displacement “vibration” due to sudden change in acceleration. [Selection] Figure 1