MANUFACTURING METHOD OF GRAPHENE TRANSPARENT CONDUCTIVE FILM AND GRAPHENE TRANSPARENT CONDUCTIVE FILM MANUFACTURED THEREWITH

摘要

To provide a technique for solving problems of graphene film formation with traditional thermal CVD or resin carbonization, without using carbon content gas such as methane gas, forming graphene at low temperature in a short time, and controlling a number of layers.SOLUTION: By making a very small amount of carbon contained in a metal substrate precipitate on the surface of the substrate by heating, and by plasma treatment using hydrogen gas under decompression, graphene grows on the substrate surface, and a graphene transparent conductive film is provided.SELECTED DRAWING: None