首页> 外国专利> ELECTROLYTIC PLATING SOLUTION ANALYZER, ELECTROLYTIC PLATING SOLUTION ANALYSIS SYSTEM, AND ELECTROLYTIC PLATING SOLUTION ANALYSIS METHOD

ELECTROLYTIC PLATING SOLUTION ANALYZER, ELECTROLYTIC PLATING SOLUTION ANALYSIS SYSTEM, AND ELECTROLYTIC PLATING SOLUTION ANALYSIS METHOD

机译:电解镀层溶液分析仪,电解镀层溶液分析系统和电解镀层溶液分析方法

摘要

To enable the state of an electrolytic plating solution to be analyzed with high accuracy.SOLUTION: Na kinds of measurement result data D1 from a "first measurement result" with regard to a measurement process executed in a state where a contact amount per unit time of an electrolytic plating solution X to a reference electrode 11R, a working electrode 11W and a counter electrode 11C is adjusted to a "first amount of contact" till a "Na'th measurement result" with regard to a measurement process executed in a state where the contact amount per unit time is adjusted to a "Na'th amount of contact" are acquired. The measurement result data D1 of an M'th measurement process in which a "first amount of difference" between the measurement result data D1 in an M'th measurement process in increasing order of the contact amount per unit time and the measurement result data D1 in an (M-1)'th measurement process in decreasing order of the contact amount per unit time is smaller than or equal to a predefined permissible amount of difference is specified. The state of the electrolytic plating solution X is analyzed on the basis of the measurement result data D1 of a measurement process in which the contact amount per unit time is larger than in the specified M'th measurement process.SELECTED DRAWING: Figure 1
机译:为了能够高精度地分析电镀液的状态。解决方案:关于在以每单位时间接触量为单位的状态下执行的测量过程,从“第一测量结果”中得到的Na种测量结果数据D1。关于在基准电极11R,工作电极11W和对电极11C上进行的电镀处理,将在基准状态下执行的测定处理的电解液X调整为“第一接触量”直至“ Na个测定结果”。将每单位时间的接触量调整为“接触的天数”。第M测量处理的测量结果数据D1,其中,第M测量处理中的测量结果数据D1与每单位时间的接触量的增加顺序之间的“第一差异量”在第(M-1)次测量处理中,以每单位时间的接触量的减小顺序小于或等于预定的容许差量的方式指定。基于每单位时间的接触量大于指定的第M次测量过程中的测量过程的测量结果数据D1,分析电镀液X的状态。

著录项

  • 公开/公告号JP2018205148A

    专利类型

  • 公开/公告日2018-12-27

    原文格式PDF

  • 申请/专利权人 HIOKI EE CORP;

    申请/专利号JP20170111306

  • 发明设计人 NAKAYAMA NAOTO;

    申请日2017-06-06

  • 分类号G01N27/416;G01N27/48;C25D21/12;

  • 国家 JP

  • 入库时间 2022-08-21 12:21:27

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