首页> 外国专利> ELECTROLYTIC PLATING SOLUTION ANALYZER, ELECTROLYTIC PLATING SOLUTION ANALYSIS SYSTEM, AND ELECTROLYTIC PLATING SOLUTION ANALYSIS METHOD

ELECTROLYTIC PLATING SOLUTION ANALYZER, ELECTROLYTIC PLATING SOLUTION ANALYSIS SYSTEM, AND ELECTROLYTIC PLATING SOLUTION ANALYSIS METHOD

机译:电解镀层溶液分析仪,电解镀层溶液分析系统和电解镀层溶液分析方法

摘要

To enable the state of an electrolytic plating solution to be analyzed with high accuracy without being affected by a difference in measurement environment.SOLUTION: While applying a voltage between a reference electrode and a working electrode to cause metal in an electrolytic plating solution to precipitate on the working electrode, an amount of electricity c1 is computed on the basis of a current value measured in a first measurement process for measuring the current value of a current flowing between a counter electrode and the working electrode and a duration of time for which the current was flowing between the counter electrode and the working electrode in the first measurement process. While applying a voltage between the reference electrode and the working electrode to cause the metal precipitated on the working electrode in the first measurement process to elute into the electrolytic plating solution, an amount of electricity c2 is computed on the basis of a current value measured in a second measurement process for measuring the current value of a current flowing between the counter electrode and the working electrode and a duration of time for which the current was flowing between the counter electrode and the working electrode in the second measurement process. Then, analysis is performed on the basis of a ratio of electricity amount between the amount of electricity c1 and the amount of electricity c2.SELECTED DRAWING: Figure 3
机译:为了能够在不受测量环境差异影响的情况下高精度地分析电镀液的状态,解决方案:在参比电极和工作电极之间施加电压以使电镀液中的金属沉淀在电镀液上在工作电极上,基于在第一测量过程中测量的电流值计算电量c1,该第一测量过程用于测量在对电极和工作电极之间流动的电流的电流值以及该电流的持续时间在第一测量过程中,电极在对电极和工作电极之间流动。在第一测量步骤中,在参考电极和工作电极之间施加电压以使沉积在工作电极上的金属洗脱到电镀液中的同时,根据测量的电流值计算电量c2第二测量过程用于测量在第二测量过程中在对电极和工作电极之间流动的电流的电流值以及在对电极和工作电极之间电流流动的持续时间。然后,根据电量c1与电量c2之间的电量比进行分析。选择的图形:图3

著录项

  • 公开/公告号JP2018205149A

    专利类型

  • 公开/公告日2018-12-27

    原文格式PDF

  • 申请/专利权人 HIOKI EE CORP;

    申请/专利号JP20170111307

  • 发明设计人 NAKAYAMA NAOTO;

    申请日2017-06-06

  • 分类号G01N27/48;G01N27/416;

  • 国家 JP

  • 入库时间 2022-08-21 12:21:27

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