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Defect inspection apparatus, management method and management apparatus for defect inspection apparatus
Defect inspection apparatus, management method and management apparatus for defect inspection apparatus
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机译:缺陷检查设备,缺陷检查设备的管理方法和管理设备
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摘要
According to one embodiment, a management method of a defect inspection apparatus, includes generating, with respect to a plurality of measurement points of a measurement target, difference values between signals obtained from an image of the measurement target and signals obtained from a reference image, generating a frequency distribution of the difference values, and determining whether the frequency distribution satisfies a predetermined condition.
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