DEFECT INSPECTION APPARATUS, MANAGEMENT METHOD OF DEFECT INSPECTION APPARATUS AND MANAGEMENT APPARATUS OF DEFECT INSPECTION APPARATUS

摘要

According to one embodiment, a management method of a defect inspection apparatus, includes generating, with respect to a plurality of measurement points of a measurement target, difference values between signals obtained from an image of the measurement target and signals obtained from a reference image, generating a frequency distribution of the difference values, and determining whether the frequency distribution satisfies a predetermined condition.