MULTI-LAYERED SUBSTRATE HAVING PIEZOELECTRIC FILM, DEVICE HAVING PIEZOELECTRIC FILM, AND METHOD FOR MANUFACTURING DEVICE HAVING PIEZOELECTRIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a multi-layered substrate having a piezoelectric film with higher versatility, and a technique related thereto.;SOLUTION: The present invention includes: a substrate; a piezoelectric film formed on the substrate; and a trap part capturing a predetermined particle, the substrate and the piezoelectric film having a resonance part which bends and vibrates at a predetermined frequency when a predetermined voltage is applied. When the trap part captures a particle while the resonance part is bending and vibrating, the frequency of the resonance part is changed.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT