LAMINATED SUBSTRATE HAVING PIEZOELECTRIC FILM, DEVICE HAVING PIEZOELECTRIC FILM, AND METHOD OF MANUFACTURING LAMINATED SUBSTRATE HAVING PIEZOELECTRIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric film with enhanced versatility and a related technique of the same.;SOLUTION: The laminated substrate includes: a substrate; an electrode film formed on the substrate; and a piezoelectric film formed on the electrode film. The piezoelectric film is formed by laminating a first piezoelectric thin film and a second piezoelectric thin film formed of a material different from that of the first piezoelectric thin film. The piezoelectric film has a relative dielectric constant between a relative dielectric constant of the first piezoelectric thin film and a relative dielectric constant of the second piezoelectric thin film.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT