Acoustic resonator with reduced active region mechanical clamping to enhance shear mode response

摘要

The present disclosure provides an acoustic resonator with reduced active region mechanical clamping to enhance shear mode response. In particular, the present disclosure provides a rigidly attached bulk acoustic wave resonator device with an active region of piezoelectric material. The active region is surrounded laterally by an inactive region where the thickness of the piezoelectric material is reduced. Piezoelectric material is missing at least at the top of the non-active region along the boundary with the active region. The resonator device provides non-continuous portions along laterally opposite edges of the piezoelectric material in the active region, reducing mechanical clamping of the active region in the direction of maximum lateral displacement during shear mode operation. ing. The advancement of mechanical separation of the active region made of piezoelectric material reduces the mechanical damping of the lateral vibration of the active region and improves the shear mode response for pseudo-shear mode sensing.