HIGH ALIGNMENT PARTICLE TRANSFER SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a particle transfer system, a particle transfer unit, and a method for transferring particles in a pattern.;SOLUTION: A particle transfer system includes a first board having a first surface for supporting particles in a pattern, a particle transfer unit having an external surface which is offset from the first surface by a first crevice, and a second board having a second surface which is offset from the external surface by a second crevice. The particle transfer unit removes particles from the first surface in response to the fact that particles are in the first crevice, fixes the particles in a pattern to the external surface, and carries the particles in the pattern. The second board removes particles in a pattern from the particle transfer unit, in response to the fact that the particles are in the second crevice. The particles are fixed to the second surface in the pattern.;SELECTED DRAWING: None;COPYRIGHT: (C)2019,JPO&INPIT