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パッケージ基板の加工方法及びパッケージ基板の加工方法に用いる被覆部材

机译:用于封装基板的处理方法的涂层构件和封装基板的处理方法

摘要

PROBLEM TO BE SOLVED: To provide a processing method for a package substrate, by which occurrence of metal burr is hindered and occurrence of abnormal wear of a cutting blade can be prevented.;SOLUTION: A processing method for a package substrate comprising: a metal frame body in which a plurality of electrodes are formed along a plurality of dividing lines; a plurality of device chips; and a molding resin layer 14 stacked on a rear surface side of the metal frame body so as to cover the plurality of device chips, comprises: a step of laying a cover member 18 on the surface of the package substrate from which the electrodes 12 are exposed along the dividing lines; a step of cutting the package substrate with the cover member attached thereto, by means of a first cutting blade 28 from above the covering member and forming cutting grooves 29 on the surface and along the dividing lines, the cutting grooves having a depth at which the electrodes are not fully cut; and a step of, after peeling the covering member, cutting respective centers of the cutting grooves with a second cutting blade thinner than the first cutting blade and dividing the package substrate into individual package device chips.;SELECTED DRAWING: Figure 5;COPYRIGHT: (C)2019,JPO&INPIT
机译:解决的问题:提供一种用于封装基板的处理方法,通过该方法,可以防止金属毛刺的发生并且可以防止切割刀片的异常磨损的发生。解决方案:一种用于封装基板的处理方法,包括:金属沿着多个分割线形成有多个电极的框体。多个设备芯片;在金属框体的背面侧以覆盖多个器件芯片的方式层叠有模制树脂层14,该模制树脂层14包括在覆盖基板12的电极12所在的表面上设置覆盖部件18的工序。沿分界线暴露;步骤:通过第一切割刀片28从覆盖部件的上方切割附接有覆盖部件的封装基板,并在表面上并沿分界线形成切割槽29,所述切割槽的深度为电极未完全切开;在剥离覆盖部件之后,用比第一切割刀片薄的第二切割刀片切割切割槽的各个中心,并将封装基板分割成单独的封装器件芯片的步骤。选图:图5;版权:( C)2019,日本特许厅

著录项

  • 公开/公告号JP2019036660A

    专利类型

  • 公开/公告日2019-03-07

    原文格式PDF

  • 申请/专利权人 DISCO ABRASIVE SYST LTD;

    申请/专利号JP20170157883

  • 发明设计人 木内 逸人;金子 智洋;

    申请日2017-08-18

  • 分类号H01L21/301;B24B27/06;H01L21/56;

  • 国家 JP

  • 入库时间 2022-08-21 12:20:01

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