Tuning fork type resonator element, tuning fork type vibrator, and manufacturing method thereof

摘要

Protrusions that protrude in an upright state at the end of the frequency adjustment metal film, which occurs when the frequency adjustment is performed by irradiating the thick frequency adjustment metal film of the tuning fork type vibrating piece with a beam in the wafer state. By pressing and crushing the portion, the protruding portion is prevented from being lost due to an impact, and frequency fluctuation is suppressed.