Coating head of mist coating film forming apparatus and maintenance method thereof

摘要

In the embodiment, a coating head of a mist coating film forming apparatus with improved yield and throughput and a maintenance method thereof are provided. The application head includes a main body. The main body includes a top plate provided with a supply port capable of supplying a mist of a raw material solution, a bottom plate provided below the top plate in a vertical direction, and the top plate and the bottom plate. And a sidewall that forms an internal space together with the top plate and the bottom plate. The sidewall includes a slit that sprays the mist from the internal space to the outside, and a recovery port that enables the mist aggregated in the internal space to be recovered. The bottom plate has an inclination that decreases in height from the inner periphery of the sidewall toward the recovery port.