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Method for measuring distance between raw material melt surface and lower end of seed crystal, method for preheating seed crystal, and method for producing single crystal

机译:原料熔融面与种晶下端之间的距离的测定方法,种晶的预热方法以及单晶的制造方法

摘要

An interval measuring method is a method of measuring the intervals on a raw material melt liquid surface and at the lower end of a seed crystal configured on the raw material melt liquid, before cultivating a single crystal at the lower end of the seed crystal by contacting the lower end of the seed crystal with a raw material melt liquid in a crucible, wherein an optical method comprises the steps of obtaining the position information of a real image lower end point and a mirror image point, wherein the real image lower end point is a specific point at the lower end of the seed crystal, and the mirror image point is a point corresponding to the real image lower end point in the mirror image of the seed crystal mapped on the liquid surface; setting the interval between the raw material melt liquid surface and the lower end of the seed crystal as 0 at the point where the positions of the real image lower end point and the mirror image point are consistent, thereby obtaining the interval between the raw material melt liquid surface and the lower end of the seed crystal. By the method, the interval between the raw material melt liquid surface and the seed crystal can be measured accurately before the raw material melt liquid surface and the seed crystal are contacted.
机译:间隔测定法是在通过接触接触在籽晶的下端培养单晶之前,对原料熔液的表面和构成于该原料熔液的籽晶的下端的间隔进行测定的方法。在原料坩埚中用原料熔融液在种晶的下端,其中,光学方法包括以下步骤:获得实像下端和镜面点的位置信息,其中,实像下端为在晶种的下端的特定点,镜像点是与映射在液面上的晶种的镜像中的实像的下端点对应的点。在实像下端点与镜像点的位置一致的点上,将原料熔融液表面与籽晶的下端的间隔设为0,求出原料熔融之间的间隔。液体表面和晶种的下端。通过该方法,可以在原料熔融液表面和籽晶接触之前准确地测量原料熔融液表面和籽晶之间的间隔。

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