Substrate is sealed for liquid discharge head, the manufacturing method and liquid discharging head of liquid discharge head substrate

摘要

PROBLEM TO BE SOLVED: To provide a substrate for a liquid discharge head capable of reducing occurrence of ESD (electrostatic discharge) phenomenon and capable of reducing damage of the substrate even if the ESD phenomenon occurs, and to provide the liquid discharge head, and a method for production of the substrate.SOLUTION: A current-carrying layer 2 including a discharge energy generation part 2a1 capable of generating the discharge energy for discharging a liquid is formed on the surface of a silicon substrate 1 of a substrate 101 for a liquid discharge head. The surface of the current-carrying layer 2 is covered by an insulation protective layer 12 and further, at least a part of the surface of the insulation protective layer 12 is covered by a charge storage part 14. The charge storage part 14 has a plane area larger than that of the current-carrying layer 2.SELECTED DRAWING: Figure 1