WAVEFRONT SENSOR, WAVEFRONT MEASUREMENT METHOD, AND METHOD FOR DETERMINING OPTICAL MODULE POSITION

摘要

PROBLEM TO BE SOLVED: To provide a wavefront sensor that detects the wavefront of the irradiated light of an optical module based on the arrangement angle of the optical module.SOLUTION: The wavefront sensor comprises: a first beam splitting unit 1 for transmitting or reflecting an incident beam and installed at a preset angle in a laser module 20 that radiates a beam 101 to be measured; a collimator 3 for irradiating the first beam splitting unit 1 with a first reference beam 102 in an opposite direction to the direction of reference beam irradiation that constitutes the angle reference of the wavefront sensor; a wavefront detection unit 5 for measuring the wavefront inclination of a second reference beam 103 obtained from the first reference beam 102 by being reflected at the first beam splitting unit 1, and calculating a relative angle to the laser module 20 from the measured wavefront inclination.SELECTED DRAWING: Figure 1