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Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector
Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector
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机译:用于末端执行器的抽吸设备,用于保持基板的末端执行器和制造末端执行器的方法
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摘要
A suction apparatus for an end effector has a main body, which has a through-channel and a contact surface, and a sealing lip. The contact surface has an edge and recesses, wherein the through-channel issues into the recesses and the recesses terminate in front of the edge. The main body has a base portion and a fastening portion, which adjoins the base portion. In the fastening portion connection channels are provided which are in fluid communication with the through-channel and extend from the edge of the fastening portion. An end effector and a method of producing an end effector are also shown.
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