SUCTION APPARATUS FOR AN END EFFECTOR END EFFECTOR FOR HOLDING SUBSTRATES AND METHOD OF PRODUCING AN END EFFECTOR

摘要

A suction apparatus (14) for an end effector (10) has a main body (28), which has a through-channel (36) and a contact surface (38), and a sealing lip (30). The contact surface has an edge (39) and recesses (40), wherein the through-channel (36) issues into the recesses and the recesses (40) terminate in front of the edge (39). The main body (28) has a base portion (32) and a fastening portion (34), which adjoins the base portion (32). In the fastening portion (34), connection channels (44) are provided which are in fluid communication with the through-channel (36) and extend from the edge of the fastening portion (34). An end effector (10) and a method of producing an end effector (10) are also described.