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Fluidized bed reactor for producing polycrystalline silicon granules and method for the assembly of such a fluidized bed reactor
Fluidized bed reactor for producing polycrystalline silicon granules and method for the assembly of such a fluidized bed reactor
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机译:用于生产多晶硅颗粒的流化床反应器及其组装方法
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摘要
Assembly of a fluidized bed reactor for the preparation of polycrystalline silicon granules by chemical vapor deposition of silicon onto seed particles and removal of polycrystalline silicon granules is facilitated without breakage and with gas tightness by a specific assembly sequence.
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