公开/公告号US10153201B2
专利类型
公开/公告日2018-12-11
原文格式PDF
申请/专利权人 INTERNATIONAL BUSINESS MACHINES CORPORATION;GLOBALFOUNDRIES INC.;THE RESEARCH FOUNDATION FOR THE STATE UNIVERSITY OF NEW YORK;
申请/专利号US201715417848
申请日2017-01-27
分类号H01L21/768;H01L21/8238;H01L23/535;H01L23/528;H01L23/532;H01L29/66;H01L29/78;H01L21/285;H01L23/485;H01L29/08;H01L27/092;
国家 US
入库时间 2022-08-21 12:14:38