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Method, apparatus, and system for improved memory cell design having unidirectional layout using self-aligned double patterning

机译:用于使用自对准双图案的具有单向布局的改进的存储单元设计的方法,装置和系统

摘要

At least one method, apparatus and system disclosed involves an integrated circuit comprising a unidirectional metal layout. A first set of metal features are formed in a vertical configuration in a first metal layer of a memory cell. A second set of metal features are formed in a unidirectional horizontal configuration in a second metal layer of the memory cell. A third set of metal features are formed in the unidirectional horizontal configuration in a second metal layer of a functional cell for providing routing compatibility between the memory cell and the functional cell. The memory cell is placed adjacent to the functional cell for forming an integrated circuit device.
机译:所公开的至少一种方法,装置和系统涉及包括单向金属布局的集成电路。在存储单元的第一金属层中以垂直配置形成第一组金属特征。第二组金属特征以单向水平配置形成在存储单元的第二金属层中。在功能单元的第二金属层中以单向水平配置形成第三组金属特征,以提供存储单元和功能单元之间的布线兼容性。存储单元与功能单元相邻放置,以形成集成电路器件。

著录项

  • 公开/公告号US10340288B2

    专利类型

  • 公开/公告日2019-07-02

    原文格式PDF

  • 申请/专利权人 GLOBALFOUNDRIES INC.;

    申请/专利号US201615226867

  • 发明设计人 JUHAN KIM;MAHBUB RASHED;

    申请日2016-08-02

  • 分类号H01L27/118;H01L29/78;H01L27/11;H01L27/02;

  • 国家 US

  • 入库时间 2022-08-21 12:14:21

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