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Method for protecting a MEMS unit against infrared investigations and MEMS unit
Method for protecting a MEMS unit against infrared investigations and MEMS unit
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机译:用于保护MEMS单元免遭红外检查的方法和MEMS单元
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摘要
A method is provided for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, a surface patterning being performed for at least one first area of a surface of the MEMS unit, the first area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90% of an infrared light incident upon it.
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