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Method for protecting a MEMS unit against infrared investigations and MEMS unit
Method for protecting a MEMS unit against infrared investigations and MEMS unit
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机译:用于保护MEMS单元免遭红外检查的方法和MEMS单元
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摘要
A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.
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