Electrostatic discharge protection using vertical fin CMOS technology

摘要

Embodiments include a method and resulting structures for vertical fin CMOS technology for electrostatic discharge protection. In a non-limiting embodiment, forming a first set of semiconductor fins vertically extending from a substrate, and forming a second set of semiconductor fins vertically extending from the substrate, the distance between the first set of fins and the second set of fins defines a length of a junction. Embodiments also include forming a first epitaxy layer on the substrate, and forming a second epitaxy layer atop a portion of the first epitaxy layer, wherein a PN junction is formed between the first epitaxy layer and the second epitaxy layer, wherein a length of the PN junction is defined by the first set of semiconductor fins and the second semiconductor fins. Embodiments include forming a first metal contact atop the first epitaxy layer, and forming a second metal contact atop the second epitaxy layer.