首页>
外国专利>
Image contrast in X-Ray topography imaging for defect inspection
Image contrast in X-Ray topography imaging for defect inspection
展开▼
机译:用于缺陷检查的X射线形貌成像中的图像对比度
展开▼
页面导航
摘要
著录项
相似文献
摘要
A system for X-ray topography, the system includes a source assembly, a detector assembly, a filter and a processor. The source assembly is configured to direct at least an X-ray beam to impinge, at an angle, on a first surface of a sample, the X-ray beam is divergent when impinging on the first surface. The detector assembly is configured to detect the X-ray beam that had entered the sample at the first surface, diffracted while passing through the sample and exited the sample at a second surface that is opposite to the first surface, and to produce an electrical signal in response to the detected X-ray beam. The filter is mounted between the source assembly and the first surface, and is configured to attenuate an intensity of a selected spectral portion of the X-ray beam. The processor is configured to detect one or more defects in the sample based on the electrical signal.
展开▼