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Hybrid Silicon Lasers on Bulk Silicon Substrates
Hybrid Silicon Lasers on Bulk Silicon Substrates
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机译:体硅衬底上的混合硅激光器
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摘要
Hybrid silicon lasers are provided including a bulk silicon substrate, a localized insulating layer that extends on at least a portion of the bulk silicon substrate, an optical waveguide structure on an upper surface of the localized insulating layer. The optical waveguide structure includes an optical waveguide including a silicon layer. A lasing structure is provided on the optical waveguide structure.
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