POSITIONING DEVICE FOR AN INTEGRATED CIRCUIT BOARD, AND INSPECTION APPARATUS FOR AN INTEGRATED CIRCUIT BOARD COMPRISING SUCH A POSITIONING DEVICE

摘要

A device for positioning an integrated circuit wafer includes:a base, called upper, and a base, called lower, arranged at a distance from one another in a direction, called vertical, so as to leave a free space between the bases;a support, provided to be mobile between the upper and lower bases, and including a location for receiving the wafer to be inspected;at least one first means apparatus for positioning the support in the vertical direction against, or by cooperation with, the upper base; andat least one second means apparatus for positioning the support in the vertical direction against, or by cooperation with, the lower base.;Also provided is an inspection equipment for an integrated circuit wafer implementing such a positioning device.