首页> 外国专利> PRESSING SOLDER BUMPS TO MATCH PROBE PROFILE DURING WAFER LEVEL TESTING

PRESSING SOLDER BUMPS TO MATCH PROBE PROFILE DURING WAFER LEVEL TESTING

机译:在晶圆水平测试过程中,按焊锡凸点以匹配探针轮廓

摘要

A method of pressing solder bumps using a pressing apparatus before testing a wafer, including loading the wafer into the pressing apparatus, where the wafer includes a number of chips, and the wafer is aligned with respect to a test head of the pressing apparatus. The test head includes a substrate which has pressing structures arranged across a surface of the substrate facing the wafer. The pressing structures contact the solder bumps, where the solder bumps include a first surface topology and the pressing structures include a pressing surface topology prior to the contact. The caused contact includes altering a shape of each of the plurality of solder bumps, such that the plurality of solder bumps then a second surface topology after the caused contact, and the second surface topology of the solder bumps matches the pressing surface topology after the caused contact.
机译:一种在测试晶片之前使用挤压装置挤压焊料凸块的方法,包括将晶片装载到挤压装置中,其中晶片包括多个芯片,并且晶片相对于挤压装置的测试头对准。该测试头包括基板,该基板具有压制结构,该压制结构布置在基板的面对晶片的表面上。按压结构接触焊料凸块,其中,焊料凸块包括第一表面拓扑,并且按压结构在接触之前包括按压表面拓扑。引起的接触包括改变多个焊料凸块中的每一个的形状,以使得多个焊料凸块在引起引起的接触之后具有第二表面拓扑,并且焊料凸块的第二表面拓扑与在引起引起的接触之后的按压表面拓扑匹配。联系。

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