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HYDROGEN GENERATOR FOR AN ION IMPLANTER

机译:离子注入机用氢气发生器

摘要

A terminal for an ion implantation system is provided, wherein the terminal has a terminal housing for supporting an ion source configured to form an ion beam. A gas box within the terminal housing has a hydrogen generator configured to produce hydrogen gas for the ion source. The gas box is electrically insulated from the terminal housing, and is further electrically coupled to the ion source. The ion source and gas box are electrically isolated from the terminal housing by a plurality of electrical insulators. A plurality of insulating standoffs electrically isolate the terminal housing from an earth ground. A terminal power supply electrically biases the terminal housing to a terminal potential with respect to the earth ground. An ion source power supply electrically biases the ion source to an ion source potential with respect to the terminal potential. Electrically conductive tubing electrically couples the gas box and ion source.
机译:提供了一种用于离子注入系统的端子,其中该端子具有用于支撑被配置为形成离子束的离子源的端子壳体。终端壳体内的气体箱具有氢气发生器,该氢气发生器构造成产生用于离子源的氢气。气箱与端子壳体电绝缘,并且进一步电耦合至离子源。离子源和气体箱通过多个电绝缘体与端子盒电隔离。多个绝缘支座将端子外壳与大地电气隔离。端子电源将端子外壳相对于大地电偏置到端子电势。离子源电源相对于终端电势将离子源电偏置到离子源电势。导电管将气体箱和离子源电连接。

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