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LATERALLY DOUBLE DIFFUSED METAL OXIDE SEMICONDUCTOR (LDMOS) DEVICE ON FULLY DEPLETED SILICON ON INSULATOR (FDSOI) ENABLING HIGH INPUT VOLTAGE
LATERALLY DOUBLE DIFFUSED METAL OXIDE SEMICONDUCTOR (LDMOS) DEVICE ON FULLY DEPLETED SILICON ON INSULATOR (FDSOI) ENABLING HIGH INPUT VOLTAGE
The present disclosure relates to semiconductor structures and, more particularly, to an LDMOS device on FDSOI structures and methods of manufacture. The laterally double diffused semiconductor device includes a gate dielectric composed of a buried insulator material of a semiconductor on insulator (SOI) technology, a channel region composed of semiconductor material of the SOI technology and source/drain regions on a front side of the buried insulator material such that a gate is formed on a back side of the buried insulator material. The gate terminal can also be placed at a hybrid section used as a back-gate voltage to control the channel and the drift region of the device.
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