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System and method for LADAR-based optic alignment and characterization

机译:用于基于LADAR的光学对准和表征的系统和方法

摘要

An optical alignment system includes a LADAR sub-system including: a laser source and a probe configured to deliver probe illumination from the laser source to a first optical surface of the optical system and an additional optical surface of the optical system. The probe is further configured to receive a first measurement signal from the first optical surface and an additional measurement signal from the additional optical surface of the optical system. The system also includes a detector configured to receive a first combined signal and an additional combined signal from an optical coupling assembly. The system further include a controller configured to determine a relative distance between the first optical surface and the additional optical surface based on the first combined signal or the additional combined signal.
机译:光学对准系统包括LADAR子系统,该LADAR子系统包括:激光源和探针,该探针被配置为将探针照明从激光源传递到光学系统的第一光学表面和光学系统的附加光学表面。探针还被配置成从光学系统的第一光学表面接收第一测量信号和从附加光学表面接收附加测量信号。该系统还包括检测器,该检测器被配置为从光耦合组件接收第一组合信号和附加组合信号。该系统还包括控制器,该控制器被配置为基于第一组合信号或附加组合信号来确定第一光学表面和附加光学表面之间的相对距离。

著录项

  • 公开/公告号US10145944B1

    专利类型

  • 公开/公告日2018-12-04

    原文格式PDF

  • 申请/专利权人 KLA-TENCOR CORPORATION;

    申请/专利号US201514703664

  • 申请日2015-05-04

  • 分类号G01C3/08;G01S7/497;G01S17/42;

  • 国家 US

  • 入库时间 2022-08-21 12:07:58

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