首页> 外国专利> MICRO-ELECTRO-MECHANICAL ACTUATOR DEVICE OF PIEZOELECTRIC TYPE AND APPARATUS INTEGRATING THE MICRO-ELECTRO-MECHANICAL ACTUATOR DEVICE

MICRO-ELECTRO-MECHANICAL ACTUATOR DEVICE OF PIEZOELECTRIC TYPE AND APPARATUS INTEGRATING THE MICRO-ELECTRO-MECHANICAL ACTUATOR DEVICE

机译:压电型微机电致动器装置和集成了微机电致动器装置的装置

摘要

A micro-electro-mechanical actuator device includes a fixed structure and a mobile structure. The mobile structure includes a first deformable band, a second deformable band, and a third deformable band, both of which extend on opposite sides of the first deformable band, each of which carries a piezoelectric actuator. In a working condition, in which the second and third piezoelectrics are biased, the second and third deformable bands are subjected to a negative bending, while the first deformable band is subjected to a positive bending. There are thus generated two translations that add together, causing a displacement of the first deformable band greater than the one that may be obtained by a single membrane of an equal base area.
机译:微机电致动器装置包括固定结构和活动结构。可移动结构包括第一可变形带,第二可变形带和第三可变形带,它们均在第一可变形带的相对侧上延伸,每个第一可变形带均承载压电致动器。在第二和第三压电体被偏置的工作状态下,第二和第三可变形带受到负弯曲,而第一可变形带受到正弯曲。因此,产生了两个平移,这些平移加在一起,导致第一可变形带的位移大于可通过具有相等基面积的单个膜获得的位移。

著录项

  • 公开/公告号US2019161338A1

    专利类型

  • 公开/公告日2019-05-30

    原文格式PDF

  • 申请/专利权人 STMICROELECTRONICS S.R.L.;

    申请/专利号US201816197810

  • 发明设计人 DOMENICO GIUSTI;CARLO LUIGI PRELINI;

    申请日2018-11-21

  • 分类号B81B3;

  • 国家 US

  • 入库时间 2022-08-21 12:07:32

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